Anionic impurities in concentrated semiconductor grade ammonium hydroxide
AN-S-365
vi
<p>Ultrapure chemicals are required in the semiconductor industry. Ionic impurities may lead to compromised products. This application describes the determination of anionic impurities in semiconductor grade 28% ammonium hydroxide solution. To avoid matrix disturbances, Inline Neutralization and Inline Preconcentration with Matrix Elimination needs to be applied.</p>
Ultrapure chemicals are required in the semiconductor industry. Ionic impurities may lead to compromised products. This application describes the determination of anionic impurities in semiconductor grade 28% ammonium hydroxide solution. To avoid matrix disturbances, Inline Neutralization and Inline Preconcentration with Matrix Elimination needs to be applied.