Simultaneous determination of fluoride species plus acid anions in etching baths by ion chromatography with dual detection


This poster presents a straightforward ion chromatographic determination of HF, HNO3, short-chain organic acids and H2SiF6 in etching bath samples. Standard ions such as fluoride, nitrate, acetate and sulfate are determined via suppressed conductivity detection while dissolved silicate is spectrophotometrically detected in the same run after downstream post-column reaction (PCR) as molybdosilicic acid. Analytical results of several commercial HF-HNO3-H2SiF6 mixtures obtained by ion chromatography (IC) and titration showed good agreement, which confirms the applicability of the presented «dual» detection IC method for controlling the composition of acidic texturing baths.