The semiconductor industry requires high-purity or even ultrahigh-purity chemicals for the production of electronic components. The purity of the chemicals is crucial for the quality and efficient production of the parts. Here, hydrogen peroxide and ammonium hydroxide are analyzed applying traditional sample preparation methods like digestion and evaporation with subsequent reconstitution with ultrapure water. The received samples are injected applying intelligent Preconcentration Technique (MiPCT).