Investigation of intermediates for electrodeposition of copper with the rotating ring disc electrode (RRDE) from Autolab

Main document

Copper is one of the technologically relevant metals, particularly for the semiconductor industry. Metallic copper has been used as a conductor for the manufacture of processors since 1997. The electrodisposition procedure is known as the Dual-Damascene process and involves the electrolytic plating of copper from an acidic copper bath in the presence of additives.

This Application Note describes how the RRDE (Rotating Ring Disc Electrode) from Autolab can be used for the detection of copper intermediates and for the investigation of copper deposition.